Micropatterning of lanthanum-based oxide thin film on self-assembled monolayers.

Abstract

We studied the direct micropatterning of a lanthanum-based thin film on a template of self-assembled monolayers in an aqueous solution at 80 degrees C. The template composed of silanol and octadecyl areas was prepared by UV-modified octadecyltrichlorosilane SAMs through a photomask. The amorphous La(2)O(CO(3))(2) x H(2)O thin films were selectively deposited in the silanol regions. Crystallized La(2)O(3) was obtained after heating at 800 degrees C in air.

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